CVD@materials

Chemical Vapor Deposition (CVD) is a chemical process of making a required materials into a thin film by vaporizing the material and by utilizing chemical reactions in the gas phase at the surface of the substrate under various pressure conditions.
Volatile compounds are used as CVD materials and metal alkoxides are one of the representative CVD materials.


Product Line

CVT»•iΠ‰ξ
Kojundo Chemical Lab. Co., Ltd. is a pioneering supplier of TEOS, which is most widely used as CVD materials for the semiconductor devices.
In addition to TEOS, we are supplying TEOP, TEB, which are often used with TEOS and a variety of other CVD materials.

 

Materials for chemical vapor deposition

  Molecular Weight Melting Point degrees Celsius Vapor Pressures(Log10P=) Specific Gravity  
Si(OC2H5)4
TEOS
CAS 78-10-4
208.33 -82.5Ž log10P=4.9936-856.8/
(t+118.13) (P:kPa,t:Ž)
0.9213(20/4) Hydrolyzed by reacting gradually with water
P(OCH3)3
TMP
CAS 121-45-9
124.08 -78Ž log10P=10.178-2024.1/
(t+273.15) (P:Pa,t:Ž)
1.0518(20) Decomposed by reacting violently with water
PO(OCH3)3
TMOP
CAS 12-56-1
140.07 ƒΏŒ^-46.1Ž
ƒΐŒ^-62.5Ž
log10P=10.17-2416/
(t+273.15) (P:Pa,t:Ž)
1.214(20/4) Reacting mildly with water
PO(OC2H5)3
TEOP
CAS 78-40-0
182.15 -56.4Ž log10P=10.3308-2577/
(t+273.15) (P:Pa,t:Ž)
1.0695(20) Reacting mildly with water
B(OCH3)3
TMB
CAS 121-43-7
103.91 -29.3Ž log10P=10.232-1785.3/
(t+273.15) (P:Pa,t:Ž)
0.9205(24.3) Readily hydrolyzed with moisture in the atmosphere
B(OCT2H5)3
TEB
CAS 150-46-9
145.99 -84.8Ž log10P=10.2666-2061/
(t+273.15) (P:Pa,t:Ž)
0.8635(20/4) Readily hydrolyzed with moisture in the atmosphere

 

Materials for ALD

(* is our original products)
(** RT stands for room temperature)
  Molecular Weight Melting Point degrees Celsius Vapor Pressures(Log10P=) Specific Gravity  

Hf[N(CH3)2]4
TDMAH

PDF (M)SDS

CAS 19782-68-4
354.79 28Ž log10P=12.115-3377/
(t+273.15) (P:Pa,t:Ž)
1.48i50j Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere

Hf[N(C2H5)2]4
TDEAH

PDF (M)SDS

CAS 19824-55-6
167.01 -70Ž –ρ90Ž/13.3Pa 1.25(20) Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere.

Zr[N(C2H5)CH3]4
TEMAZ

PDF (M)SDS

CAS 175923-04-3
323.63 <-70Ž –ρ65Ž/13.3Pa 1.05(20) Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere.

SiH[N(CH3)2]3
3DMAS

CAS 15112-89-7
161.32 -90Ž log10P=10.177-2147/
(t+273.15) (P:Pa,t:Ž)
0.580(20) Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere.

Ta(NtC5H11)[N(CH3)2]3
*Taimata

PDF (M)SDS

CAS 440081-38-9
398.32 36Ž log10P=10.795-3233/
(t+273.15) (P:Pa,t:Ž)
1.43 Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere.

Ta(NtC4H9)[N(C2H5)CH3]3
TBTEMT

CAS 511292-99-2
426.37 Liquid at log10P=10.54-3233/
RT** (t+273.15) (P:Pa,t:deg C)
1.32 Decomposed by reacting violently with water.
Decomposed by reacting oxygen in the atmosphere.

 

Materials for MOCVD

(* is our original products)
  Molecular Weight Melting Point degrees Celsius Vapor Pressures(Log10P=) Specific Gravity ”υl

Ta(OC2H5)5
PET

PDF (M)SDS

CAS 6074-84-6
406.25 21Ž log10P=12.645-4505/
(t+273.15) (P:Pa,t:Ž)
1.56 Hydrolyzed by reacting with moisture in the atmosphere

Hf(OtC4H9)4
HTB

PDF (M)SDS

CAS 2172-02-3
407.94 8Ž log10P=11.265-3052/
(t+273.15) (P:Pa,t:Ž)
1.17 Hydrolyzed by reacting with moisture in the atmosphere

Al(OsecC4H9)3

PDF (M)SDS

CAS 2269-22-9
246.32 -60Ž log10P=13.325-4698/
(t+273.15) (P:Pa,t:Ž)
0.937 Hydrolyzed by reacting with moisture in the atmosphere

Ru(C5H4C2H5)2

CAS 32992-96-4
287.36 6Ž log10P=11.875-3708/
(t+273.15) (P:Pa,t:Ž)
1.56 Relatively stable in the atmosphere

Pb(C11H19O2)2

CAS 21319-43-7
573.73 130Ž Έ‰Ψ log10P=20.545-7800/(t+273.15) (P:Pa,t:Ž)
φ”­ log10P=12.065-4480/(t+273.15) (P:Pa,t:Ž)
1.52 Relatively stable in the atmosphere

* Zr(OiC3H7)
(C11H19O2)3

CAS 343311-16-0
700.11 >210Ž log10P=19.735-7924/
(t+273.15) (P:Pa,t:Ž)
1.0 Decomposed by reacting with moisture and oxygen in the atmosphere

Ti(OiC3H7)2
(C11H19O2)2

CAS 144665-26-9
532.58 160Ž log10P=14.855-5435/
(t+273.15) (P:Pa,t:Ž)
1.0 Decomposed by reacting with moisture and oxygen in the atmosphere

We are providing a wide range of items including the items listed above.
Prease feel free to contact one of here for more information.


Production System

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Advanced techniques are required to produce CVD materials for its high purity and property.
Our techniques, such as the refining and the analysis of these materials, the cleaning and the maintenance of cylinders and even its manufacturing, have always been well-accepted by our customers.



 

Research and Development System

Œ€‹†ŠJ”­‘̐§
Kojundo Chemical Lab. Co., Ltd. is promoting advanced research and development of next-generation CVD materials in response to varied user's needs.
Our products have been developed through our refining technique of metal organic compounds, halogenide and alkoxides as a reagent manufacturer and our mass production technique of the silicon semiconductor materials, and we have prided ourselves on supplying high quality products to our customers.


How to supply our products

All products are contained in sealed containers such as a glass ampoule or a stainlesssteel cylinder so that metal organic compounds, halogenides and alkoxides may not react with moisture and oxygen in the air.

1. Glass Ampoule

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Glass ampoule is most frequently used as a supplying container for alkoxide or halogenide. 25g, 50g, 250g and 500g types are standard fill ration. When purchasing our products in an ampoule, we recommend our customers to divide the quantity needed into small ampoules like 25g type for its preservation unless the large amount is needed at one time.



2. Stainless-steel Cylinder

iaj Stainless-steel Cylinder is used not only for the safe delivery of combustible substances such as organo metallic compounds, it is also possible to attach to the CVD devices directly and use it as a bubbler. ƒXƒeƒ“ƒŒƒXƒVƒŠƒ“ƒ_[
ibj We are able to supply the custom-designed cylinder filled with CVD materials.This order is based on the quantity needed and the size of its devices.